3-Dimensionally ordered macroporous LiMn2O4 thin film was prepared by a sol-gel and dip coating method on Pt/Ti/SiO2/Si substrate. An opal structure consisting of mono dispersed polystyrene beads (300 nm) was used as a template. After solution containing Mn and Li precursors was coated on the template-deposited substrate, the template and organic materials in the precursors was removed by calcination at 400 oC. And then the 3-dimensional LiMn2O4 thin film with spinel structure was fabricated by heat treatment at 700 oC. The structural and electrochemical property was investigated by XRD, SEM and charge-discharge cycler.
Key Words : 3-D microbattery, Sol-gel, Template, LiMn2O4, Thin film